Low- to Medium-Flow Applications

Entegris”s CR8 Series product line includes valves and valve manifolds for ultrapure chemical applications. Two-way pneumatic and manual valves and manifolds for low- to medium-flow applications, with flow factors (Cv) ranging from two to four. The valves offer reliable performance and easy serviceability − with a footprint that is smaller than most half-inch valves. CR8 Series valves are tested to four million cycles to ensure reliability and reduce cost of ownership. The two-way pneumatic valve is available in a high temperature version, which can operate up to 180 C (356 F). These capabilities allow the CR8 Series to solve a variety of critical issues within the fab, such as purity, corrosion and high-temperature application needs. The CR8 Series valve manifolds are designed to reduce installation time and minimize connections within the fab. A good fit for wet etch and clean (WEC) and low volume bulk chemical delivery applications, the entire valve line incorporates compact modular valve designs with high temperature capabilities at maximized Cv levels.