Monitor & Control Liquid Chems for Semicon

Nov. 15, 2012

Swagelok”sCR-288 concentration monitor is designed to address a criticalrequirement in the semiconductor industry for improved monitoring andcontrol of liquid chemicals employed in device manufacturing. Installedin …

Swagelok”sCR-288 concentration monitor is designed to address a criticalrequirement in the semiconductor industry for improved monitoring andcontrol of liquid chemicals employed in device manufacturing. Installedin the process stream or at point-of-use where chemicals are deliveredor blended, the technology delivers real-time, highly accuratemeasurements of the concentration and temperature of process fluids.The monitor provides in-line analysis of liquid chemical concentration.Designed specifically for the semiconductor industry, it is physicallysmall, easy to install, and serviceable in the field. Proprietarysoftware enables the technician to calibrate the unit for chemicalmixtures used in semiconductor laboratory or manufacturing processes,including etching, wafer cleaning, and chemical mechanicalplanarization (CMP). The software provides a graphical readout that thetechnician may customize for data logging over time. Concentrationaccuracy is +/- 0.1 percent. Concentration accuracy is based onmeasuring ethylene glycol and water at 20 PSIG (1.3 bar), 76.1 F to78.8 F (24.5 C to 26 C), and calibration range of zero to 100 percent.Temperature accuracy is 0.1 C. Temperature resolution is 0.01 C.Response time is 1.2 sec.

Sponsored Recommendations

Learn About: Micro Motion™ 4700 Config I/O Coriolis Transmitter

An Advanced Transmitter that Expands Connectivity

Micro Motion™ G-Series Compact, Drainable Coriolis Flow and Density Meters

Micro Motion G-Series Coriolis flow and density meters are ideally suited for Process Monitoring and Optimization applications, offering easy selection with pre-selected models...

Learn about: Micro Motion G-Series Coriolis Flow and Density Meters

The Micro Motion G-Series is designed to help you access the benefits of Coriolis technology even when available space is limited.

Micro Motion 4700 Coriolis Configurable Inputs and Outputs Transmitter

The Micro Motion 4700 Coriolis Transmitter offers a compact C1D1 (Zone 1) housing. Bluetooth and Smart Meter Verification are available.